"中国拟建SSMB-EUV光刻厂，超越ASML往往仅在一念之差"

GOOGLE SEARCHING RESULTS IN ABOVE RESULT

所有跟帖： 

• https://www.euvlitho.com/2021/S34.pdf -猎人之家- ♂ (0 bytes) () 09/13/2023 postreply 20:27:35

• 这只是光源。还需要一系列聚焦/纠正镜头.那才是难点 -huntridge- ♂ (0 bytes) () 09/13/2023 postreply 20:38:36

• 大陆可能有不少smart engineers, qinHua, BeiDa ... -zhoufang- ♂ (683 bytes) () 09/13/2023 postreply 20:43:09

• 同赞 -常如- ♂ (264 bytes) () 09/14/2023 postreply 04:20:37

• 重剑无锋，大巧不工的清华EUV光刻机方案 -半城雨- ♂ (108 bytes) () 09/13/2023 postreply 20:43:24

• "对QinHua老师佩服的五体投地“ -zhoufang- ♂ (0 bytes) () 09/13/2023 postreply 20:45:19

• 同时解决EUV光源小型化和光源能量限制 -半城雨- ♂ (0 bytes) () 09/13/2023 postreply 20:46:42

• ZT:现在国内光刻机三条主路线三个主抓手，最现实主义也是 -山上老熊- ♂ (3983 bytes) () 09/13/2023 postreply 22:36:24

• 学习了。看来有戏！ -后院有树- ♂ (93 bytes) () 09/13/2023 postreply 23:05:06

• 谢老熊科普 -12qw- ♀ (0 bytes) () 09/14/2023 postreply 04:03:12

• ssmb-euv stands for what? thanks! -井底之蛙-77- ♂ (0 bytes) () 09/14/2023 postreply 04:17:57

• 查到了, steady-state microbunching extreme violet (light). -井底之蛙-77- ♂ (0 bytes) () 09/14/2023 postreply 05:14:07

• 妥妥的同步辐射啊 -韭菜又逢春- ♂ (0 bytes) () 09/14/2023 postreply 05:58:36