高能电子尾巴,随着气压的升高,分布的峰值向右移,高能电子数目增加。微空心阴极放电中单位体积的激发率、电离率随着气压立方的增加而增

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高气压辉光放电理论与实验

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论文标题:高气压辉光放电理论与实验
Theory and Experiments of High-Pressure Glow Discharge
论文作者
论文导师 王又青,论文学位 博士,论文专业 物理电子学
论文单位 华中科技大学,点击次数 3,论文页数 136页File Size1520K
2006-09-01论文网 http://www.lw23.com/lunwen_565001897/
High-pressure glow discharge;; Micro-hollow cathode discharge ;;Plane cathode micro-hollow anode discharge;; Self-consistent fluid model;; Soft switching power supply ;;Eigenvector Method;; Plasma display panel
高气压辉光放电有许多应用领域,譬如:表面处理、薄膜沉积、污染气体的消毒、平板等离子体显示、紫外准分子灯和气体激光器等,近年来它的应用得到高速发展。本文主要对微空心阴极放电、平板阴极微空心阳极放电、平板阴极微空心阳极放电维持的辉光放电等几种新颖的高气压辉光放电进行了系统的研究,并对它们的应用进行了初步研究。 微空心阴极放电作为一种高气压辉光放电,有许多优良的性质。基于微空心阴极放电结构,给出了平板阴极微空心阳极放电,它也是一种高气压辉光放电。基于微空心阴极放电维持的辉光放电结构,提出了平板阴极微空心阳极放电维持的辉光放电,它也是一种高气压辉光放电。建立了微空心阴极放电和“平板阴极微空心阳极放电维持的辉光放电”的自洽流体模型。利用该模型计算了平均电子能量分布函数、电子密度、平均电子能量(电子温度)、激发率、电离率等。结果显示:电子能量分布函数(EEDF)为非麦克斯韦分布,有一个高能电子尾巴,随着气压的升高,分布的峰值向右移,高能电子数目增加。微空心阴极放电中单位体积的激发率、电离率随着气压立方的增加而增加,电子密度则随着气压平方的增加而增加。在平板阴极微空阳极放电维持的辉光放电中,当电流与气压恒定时,随着第三电极电压的升高,电子能量分布的峰值右移,放电趋向高能化,但都会达到一个饱和值。它的电子空间分布形状与后面的实验结果比较好地相符,而且随着气压的升高电子空间分布收缩。 为了满足高气压放电实验的需要,研制了一个小型高电压软开关直流电源。设计了可靠的控制与调制电路,实现了高气压辉光放电工作方式的多样化。电源工作在谐振状态,实现了零损耗开通与关断。电源结构简单、工作方式灵活、调节方便。 对“平板阴极微空心阳极放电”和“平板阴极微空心阳极放电维持的辉光放电”进行了详细的实验研究。实验得到的光学特性与光谱特性表明放电存在强烈的电离,产生强烈的准分子辐射。而且它们的伏-安特性具有正的微分电阻系数,能够很方面地构成大的放电阵列,而不用分立镇流电阻和放电隔离。为了更好地弄清和理解这种高气压辉光放电等离子体的参数特性,利用光谱诊断法对放电等离子体进行了诊断。这种结构特别有利于准分子辐射的形成,实验结果表明:它们具有制作直流准分子激光器的潜能。为此设计了一种新颖的激光器的放电结构,在高气压条件下,研究了它的电学性质和光学性质,得出一些有益的结论:放电等离子体有极高的功率密度和电子密度,电子密度在1013cm-3数量级,这种结构特别有利于增加气体的电离率。实验结果表明基于这种放电结构的微型激光器是可行的。 为了更好地设计高气压放电激光器的谐振腔结构,提出了一种新颖的模拟光腔模式及光束传输的特征向量法。该方法的优点是:计算与初始光场分布无关,能够一次计算出谐振腔中所有可能存在的光场,谐振腔的鉴别能力能够很容易估计出来等。利用该方法对典型空腔和有源腔的光场模式进行了模拟计算,计算结果与其它方法的计算结果很好地相符,利用该方法能够优化激光器谐振腔的设计。 本文最后对高气压辉光放电在平板等离子体显示、薄膜沉积、高气压气体加工等方面的应用进行了初步研究,显示出了优良的性能,高气压辉光放电的应用领域还在不断扩展,更广泛的研究工作也逐渐深入。
High-pressure glow discharge has many applications such as surface modification, thin film deposition, detoxification of gaseous pollution, plasma display panel, UV excimer lamps and UV excimer laser. In the thesis, a few novel high-pressure glow discharges such as micro-hollow cathode discharge (MHCD), plane cathode micro-hollow anode discharge, plane cathode micro-hollow anode sustained glow discharge are systematically investigated. The electrical and optical properties of these discharges for their potential applications are discussed. MHCD has many outstanding properties as a high-pressure glow discharge. A plane cathode micro-hollow anode discharge is given based on the configuration of MHCD. The discharge can also operate stably at high-pressure. In order to generate large-volume glow discharges at high-pressure, compared to MCSD, plane cathode micro-hollow anode sustained discharge is put forward. The discharge is also stable high-pressure glow discharge. Self-consistent fluid model is presented for MHCD and plane cathode micro-hollow anode sustained discharge. The mean electron energy distribution function (EEDF), electron density, mean electron energy (electron temperature), excitation, and ionization rates have been calculated. The results show that their EEDF is non-Maxwellian distribution, with a high-energy electron tail. The EEDF profile moves toward right with increasing pressure, so the high-energy electrons will increase. In MHCD, in per unit volume, the excitation and ionization rates are positive proportional to the cube of the gas pressure. The electron density is positive proportional to the square of the gas pressure. In plane cathode micro-hollow anode sustained discharge, the peak value of EEDF will move toward right when the third electrode voltage increases with constant current and gas pressure, but it will reach a saturated value. The spatial electron distribution is in agreement with the experiment results. Moreover, the spatial electron distribution will shrink with gas pressure increasing. In order to satisfy the requirement of the high-pressure discharge experiments, a portable high-voltage soft-switching power supply is devoloped. The reliable control circuit and modulation circuit are designed. The experimental results indicate that the power supply operates in resonant condition and realizes the zero current or zero voltage switching. The configuration is simple, the operation mode is flexible and the modulation is convenience. The experiments of two-peculiar high-pressure glow discharges are performed in detail. The electrical and the optical measurements show that the discharge has intense ionization and produces intense radiation. The V-I characteristic has a positive slope. The discharge can operate in parallel to form the large discharge array without individual ballasting resistors. In order to make clear and understand the parameter nature of the high-pressure glow discharge plasma, by the spectroscopic diagnostic technique, the plasma parameters are measured. Some valuable parameters are obtained. The discharges are especially conducive to the formation of excimer. The experiment results show that it has the potential of the fabrication direct current excimer. A novel discharge device for the laser is designed. Under high-pressure condition, the electrical properties and the optical properties are investigated. Some better conclusions are obtained. There are high power density and electron density in discharge plasma. The electron density is estimated at 1013cm-3. The device is favor to enhance the gas ionization rate. The experiment results show that the device is appropriate for the micro-laser In order to optimize the design of the resonator cavity in the high-pressure discharge gas laser, an Eigenvector Method (EM) for calculation of optical resonator modes and beam propagation is brought forward. The merits of EM includes that the considerably simpler procedure of solution of eigenvectors of the matrix eigen-equation replaces the complicated iteration in traditional methods, and there is no dependence on the initial field distribution, and a number of modes can be derived once and the discrimination capability of the resonator can be evaluated easily. The examples using EM to simulate empty resonator cavity and resonator cavity with media are given, and the calculated results match well with other method. EM can also be used to optimize the design of laser resonator cavity. Finally, these micro-discharges for several applications including plasma display panel, film deposition and high-pressure gas conversion are discussed. Some preliminary experiments performed on plasma display penal are presented. Some excellent capabilities are shown. The application areas of the high-pressure glow discharge are constantly exploited.


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