DUV做不了5纳米，因为它的波长193纳米，一次曝光最好只能做20纳米以上。靠多次曝光做到5纳米合格率5%以下。

来源: Iknowno 于 2025-10-14 18:53:19 [旧帖] [给我悄悄话] 本文已被阅读：次

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