麒麟9000s采用的多重曝光工艺在FinFET上的沟道、栅极和漏极以及触点金属层都相当干净。整体良率应该不错

来源: algo 于 2023-09-13 12:38:49 [旧帖] [给我悄悄话] 本文已被阅读：次

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