查一查；light of 13.5nm wavelength

light of 13.5nm wavelength

https://www.eenewseurope.com/en/china-developed-euv-lithography-could-trial-in-2025/

?

https://semiwiki.com/forum/threads/how-china%E2%80%99s-award-winning-euv-breakthrough-sidesteps-us-chip-ban.21912/

Former ASML head scientist Lin Nan drives China’s latest EUV breakthrough

https://www.scmp.com/news/china/science/article/3308204/former-asml-head-scientist-lin-nan-drives-chinas-latest-euv-breakthrough?

 

 

有照片

https://semiconductorsinsight.com/asml-euv-china-lil-nan-breakthrough/?utm_source=chatgpt.com

 

 

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