早在2016年台积电已经实现了通过多次曝光光刻利用DUV 生产7纳米，随着EUV到货，很快就淘汰多次曝光光刻

来源: amico 于 2024-02-07 11:56:08 [旧帖] [给我悄悄话] 本文已被阅读：次

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