when 10nm & under made with DUV, expect 低良品率，低量产，高成本.

来源: amico 于 2023-09-06 06:05:42 [] [旧帖] [给我悄悄话] 阅读数 : (0 bytes)
回答: 7nm, which TSMC did it in 2016 with DUV. no big deal. 由 amico 于 2023-09-06 05:53:28

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• this why TSMC, Samsung standardize 10nm & under with EUV -amico- ♂ 给 amico 发送悄悄话 (0 bytes) () 09/06/2023 postreply 06:08:33

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